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E / 11724 / A
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...1000 sccm1 and 0...6 slpm2
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/O-ring sealed
· Sensortechnics PRO services
ELECTRICAL CONNECTION
SPECIFICATIONS
Maximum ratings
Supply voltage3
8 to 15 V
typ. 10 ±0.01 V
Power consumption
FMAL001DU
60 mW
FMAL006DU
75 mW
Output load
NPN (Sinking)
10 mA
PNP (Sourcing)
20 mA
Temperature limits
Operating
-25 to 85°C
Storage
-40 to 90°C
Mechanical shock
100 g (5 drops, 6 axes)
1 2 3
P 1
P 2
Pin 1: Vout
Pin 2: +Vs
Pin 3: GND
Note:
1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2 slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3 Output voltage is ratiometric to supply voltage
MEDIA COMPATIBILITY
To be used with dry gases only
The FMA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor